MEMS and MOEMS : technology and applications

Cost, size, speed, weight, and precision are driving the miniaturization of mechanical systems. This book presents a detailed look at two micromachining technologies that have evolved from the integrated circuits industry: MEMS (micro-electromechanical systems) and MOEMS (micro systems with a strong...

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Bibliographic Details
Main Author: Rai-Choudhury, P. (Author)
Format: eBook
Language:English
Published: Bellingham, Washington : SPIE Press [2000]
ISBN:9781510607941
1510607943
9780819495983
0819495980
0819437166
9780819437167
Series:SPIE press monograph PM 85
Item Description:"SPIE Digital Library."--Website
Includes bibliographical references and index
Restricted to subscribers or individual electronic text purchasers
Physical Description:1 Online-Ressource
DOI:10.1117/3.2265068
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