Reliability, packaging, testing, and characterization of MOEMS/MEMS and nanodevices XII : 4 - 5 February 2013, San Francisco, California, United States ; [part of SPIE photonics west]

Bibliographic Details
Other Involved Persons: Ramesham, Rajeshuni (Other)
Format: Book
Language:English
Published: Bellingham, Wash. : SPIE 2013
ISBN:9780819493835
081949383X
Series:SPIE. Proceedings of SPIE 8614
Item Description:Literaturangaben
Physical Description:Getr. Zählung, [ca. 230] S. Ill., graph. Darst.
Subjects:
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