Reliability, packaging, testing, and characterization of MEMS/MOEMS and Nanodevices VIII : 28 - 29 January 2009, San Jose, California, United States ; [the Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices VIII Conference ... part of Photonics West 2009 ... conference is a part of the MOEMS-MEMS 2009 Devices/Apllications/Reliability Symposium ... held 24 - 29 January 2009]

Bibliographic Details
Other Involved Persons: Kullberg, Richard C. (Other)
Format: Book
Language:English
Published: Bellingham, Wash. : SPIE 2009
ISBN:9780819474520
0819474525
Series:SPIE. Proceedings of SPIE 7206
Physical Description:Getr. Zählung [ca. 190 S.]
Subjects:
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