Reliability, packaging, testing, and characterization of MEMS/MOEMS VII : 21 - 22 January, 2008, San Jose, California, USA ; [Seventh Conference on Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS ... part of the Photonics West 2008 ... was a part of the MOEMS-MEMS 2008 Micro-Nano Fabrication Symposium ... held January 20 - 25, 2008]

Bibliographic Details
Other Involved Persons: Hartzell, Allyson L. (Other)
Format: Book
Language:English
Published: Bellingham, Wash. : SPIE 2008
ISBN:9780819470591
0819470597
Series:SPIE. Proceedings of SPIE 6884
Physical Description:Getr. Zählung [ca. 280 S.]
Subjects:
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