Reliability, packaging, testing, and characterization of MEMS/MOEMS VI : 23 - 24 January, 2007, San Jose, California, USA ; [Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS Conference ... organized as part of Photonics West 2007, it is part of the MOEMS-MEMS 2007 Micro-Nano Fabrication Symposium ... held January 20 - 25, 2007]

Bibliographic Details
Other Involved Persons: Hartzell, Allyson L. (Other) ; Ramesham, Rajeshuni (Other)
Format: Book
Language:English
Published: Bellingham, Wash. : SPIE 2007
ISBN:0819465763
9780819465764
Series:SPIE. Proceedings of SPIE 6463
Item Description:Some previous conferences entitled: Reliability, testing, and characterization of MEMS/MOEMS
Includes bibliographical references and author index
Physical Description:Getr. Zählung [ca. 220 S.] 28 cm
Subjects:
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