Development of an integrated guiding and actuation element for high dynamic nanopositioning systems

Bibliographic Details
Published in:Engineering for a changing world, (2017)
Main Author: Gorges, Stephan (Author)
Other Involved Persons: Leistritz, Bianca ; Hesse, Steffen ; Ortlepp, Ingo ; Slotta, Georg ; Schäffel, Christoph
Format: electronic Article
Language:English
Published: [2017]
Physical Description:7
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Ilmenau University Library

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Published in:
Engineering for a changing world, (2017)
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