Development of an integrated guiding and actuation element for high dynamic nanopositioning systems
Published in: | Engineering for a changing world, (2017) |
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Main Author: | |
Other Involved Persons: | ; ; ; ; |
Format: | electronic Article |
Language: | English |
Published: |
[2017]
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Physical Description: | 7 |
Local Subject Headings: | |
QR Code: | Show QR Code |
Ilmenau University Library
Shelf Mark: |
- |
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Published in: Engineering for a changing world, (2017) |